Ceramic Wafer Transport Hand PeriZac
The introduction of a ceramic transport hand for the atmosphere that minimizes particle generation risk to the extreme!
In semiconductor manufacturing equipment, there is often a demand for end effectors (the hand part of a transport robot) to be made from lighter, stronger, and less deflective materials. Processes that want to handle many wafers at once require wafers to be loaded into small clearance slits, leading to the use of thinner ceramic end effectors. Transport hands (end effectors) equipped with suction mechanisms need to have internal flow paths, but using adhesive for SUS bonding increases the risk of foreign material contamination. Our ceramic suction transport hands, made with our hollow integrated technology that eliminates the risk of metal contamination and particle ingress, have become the industry standard. PeriZac has further reduced particles by innovating the contact area and position of the wafer, gently holding the non-circuit outer peripheral part. They have received positive feedback from semiconductor device manufacturers aiming to improve yield.
- Company：アスザック ファインセラミックス事業部
- Price：100,000 yen-500,000 yen
